\begin{tabular}{|l|l|l|l|}
\hline $\mathrm{W} 1=\mathrm{W} 2$ & \begin{tabular}{l}
$\mathrm{W} 3=\mathrm{W} 4=\mathrm{W} 6$ \\
$=\mathrm{W} 7=\mathrm{W} 8$
\end{tabular} & \begin{tabular}{l}
$\mathrm{W} 9=\mathrm{W} 10$ \\
$=\mathrm{W} 11$
\end{tabular} & W 5 \\
\hline $90 \mu \mathrm{~m}$ & $40 \mu \mathrm{~m}$ & $18 \mu \mathrm{~m}$ & $11 \mu \mathrm{~m}$ \\
\hline
\end{tabular}